Temperature Sensor for Monitoring Exhaust Gases

A temperature sensor (34) for determining the temperature of exhaust gases of a diesel engine is disclosed. The temperature sensor comprises a silicon support (46) and a thin electrically conducting platinum layer (36) separated from the substrate by a silicon nitride layer (44). Changes in electrical resistance of the platinum layer as a result of changes in the temperature of exhaust gases expelled from the engine and coming into contact with the platinum layer can be rapidly measured to provide diagnostic information on engine performance.

Attached files:
WO 2009144431.jpg

WO 2,009,144,431


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