Laser diode having nano patterns and method of fabricating the same
Disclosed is a laser diode having nano patterns. The laser diode has a substrate (21). A first conductive-type clad layer (35) is disposed over the substrate (21), and a second conductive-type clad layer (41) is disposed over the first conductive-type clad layer (35). An active layer (37) is interposed between the first and second conductive-type clad layers (35,41). Column-shaped nano patterns (42) are periodically arranged at a surface of the second conductive-type clad layer (41). Accordingly, there is provided a laser diode such as a distributed feedback laser diode, which is used in applications where a wavelength parameter is important.
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