Displacement Actuation and Sensing for an Electrostatic Drive

An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.

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Patents:
WO 2,010,027,466

Inventor(s): DONG JINGYAN [US]; FERREIRA PLACID M [US]

Type of Offer: Licensing



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